JPS6282738U - - Google Patents
Info
- Publication number
- JPS6282738U JPS6282738U JP17376485U JP17376485U JPS6282738U JP S6282738 U JPS6282738 U JP S6282738U JP 17376485 U JP17376485 U JP 17376485U JP 17376485 U JP17376485 U JP 17376485U JP S6282738 U JPS6282738 U JP S6282738U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafers
- nozzle
- counting
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376485U JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376485U JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6282738U true JPS6282738U (en]) | 1987-05-27 |
| JPH0316287Y2 JPH0316287Y2 (en]) | 1991-04-08 |
Family
ID=31111529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17376485U Expired JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316287Y2 (en]) |
-
1985
- 1985-11-12 JP JP17376485U patent/JPH0316287Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316287Y2 (en]) | 1991-04-08 |